RF NOISE REDUCTION KIT
The RF Noise Reduction Kit is solution for containing RF noise to prevent potential issues on the entire system caused by stray RF .
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RF Noise Reduction Kit is proven to reduce/shield RF noise
RF noise is difficult to diagnose and troubleshoot and can emit from chambers, systems, and RF components
RF noise can have adverse effects on an Endura® system by distorting signals, functionality, and performance
RF Noise Reduction Kit is easy to install and can be retrofitted to existing IMP or SIP chambers
SOURCE MAGNETRON MOTOR KIT
Semicat’s Source Magnetron Motor Kit is solution for prevalent issues of obsolete components and key to running an efficient fab.
Semicat’s Source Magnetron Motor Kit is RF shielded, has a higher torque and RPM range, and can replace OEM assemblies that have larger footprints.
| Original Magnetron Motor | Semicat Magnetron Motor |
|---|---|
| Low Torque | High Torque (1000 N-lb’s) |
| Array of Gearboxes for Different Magnets | Wider RPM Range with Single Gearbox |
| No EM/RF Shielding | Better EM/RF Shielding |
| Large Footprint with Driver | Smaller Footprint |
CHAMBER A/B WAFER DETECT KIT
Wafer Detect Kit is a proven solution to reduce and eliminate costly wafer misalignments and breakages which can result in contaminated lots and system downtime.
Wafers can be misaligned or broken due to robot issues or process chamber “sticking” or “sliding”
Early detection of wafer misalignment is crucial for diagnosing robot issues
Easy to install and compatible with 4”, 6”, 8” wafers
Wafer Detect Kit will stop wafer processing if it detects a wafer that is misaligned
Detection capability for Ch. A or Ch. B position depending on customer production demands
Wafer Detect Kit has been qualified and is currently operating at customer sites globally (up to 200 kits)
Wafer Detect Kit
WAFER DETECT KIT IS EASY TO INSTALL, RELIABLE, AND ADJUSTABLE FOR VARIOUS WAFER SHAPES AND SIZES TO REDUCE WAFER MISALIGNMENTS AND HANDLING ISSUES.
Prevent Possible Wafer Breakage
Detect wafer misalignment in Chamber A/B. Al “Sticking” can cause greater chance for wafer misalignment and subsequent wafer breakage.
Field Proven
Installed over 200 customers and has been proven to reducing wafer breakages
Greater Accuracy with 3 Sensors
Three detection sensors emit a beam onto 3 positions on the outside pedestal, forming a triangular beam area immediately on the wafer.
Adjustable Sensitivity
Fine adjustment to sensors can me made depending on wafer type, reflectivity, and wafer shapes
For any questions, comments, suggestions, or inquiries, please contact us.