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  • × AL DOOR SUPPORT PRECLEAN AL DOOR SUPPORT PRECLEAN 1 × $0.00
  • × BRACKET, GUIDE SOURCE, SIMP 200MM BRACKET, GUIDE SOURCE, SIMP 200MM 1 × $360.00
  • × CLAMP, ACME LEAD SCREW GECO CLAMP, ACME LEAD SCREW GECO 1 × $250.00
  • × FEED THRU LAMP FEED THRU LAMP 2 × $185.00
  • × AE HVF 8000 RF GENERATOR, 5KW, 208V, 3PHASE INPUT AE HVF 8000 RF GENERATOR, 5KW, 208V, 3PHASE INPUT 1 × $11,000.00
  • × ASSY, GAS MODULE 200MM TXZ ASSY, GAS MODULE 200MM TXZ 1 × $189.00
  • × BLADE, SHUTTER, 8" TA/BESC, W/ PIN BLADE, SHUTTER, 8" TA/BESC, W/ PIN 1 × $1,700.00
  • × SHAFT PLUG TOOL FOR SHIPPING SHAFT PLUG TOOL FOR SHIPPING 1 × $290.00
  • × LEAD SCREW LUBRICANT LEAD SCREW LUBRICANT 1 × $156.00
  • × O/D BLANK OFF ROTATION FLANGE O/D BLANK OFF ROTATION FLANGE 1 × $350.00
  • × HOSE ASSY FLEX BRAID 1/4IDX23.5 HOSE ASSY FLEX BRAID 1/4IDX23.5 1 × $457.00
  • × 2 TORR BARATRON 1/8VCR .12 2 TORR BARATRON 1/8VCR .12 1 × $2,250.00
  • × SB CHAMBER HARNESS SUPPORT SB CHAMBER HARNESS SUPPORT 1 × $220.00
  • × FINAL BOTTOM PURGE FINAL BOTTOM PURGE 1 × $155.00
  • × SHUTTER BOTTOM BLANKOFF SHUTTER BOTTOM BLANKOFF 1 × $250.00
  • × WELDMENT, TEE EX, VLV-THROTTLE, TXZ MCVD WELDMENT, TEE EX, VLV-THROTTLE, TXZ MCVD 1 × $677.00
  • × DXZ LIFT SENSOR BRACKET MOD DXZ LIFT SENSOR BRACKET MOD 1 × $302.00
  • × CHAMBER VIEWPORT COVER CHAMBER VIEWPORT COVER 1 × $690.00
  • × LID STRAP, RF LID STRAP, RF 1 × $214.00
  • × PLUG HEX HD SAE 5/16-24 UNF PLUG HEX HD SAE 5/16-24 UNF 1 × $12.00
  • × BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL 1 × $298.00
  • × BELLOWS, PRECLEAN BELLOWS, PRECLEAN 1 × $0.00
  • × GAS LINE, H2/N2/HE MANIFOLD CVD TIN SCGB GAS LINE, H2/N2/HE MANIFOLD CVD TIN SCGB 1 × $693.00
  • × ENI 13.56 MHZ RF GENERATOR 1.25KW ENI 13.56 MHZ RF GENERATOR 1.25KW 3 × $4,000.00
  • × BUSHING TERMINAL BWCVD BUSHING TERMINAL BWCVD 1 × $25.00
  • × SOURCE GUIDE PIN SPACER, SMALL SOURCE GUIDE PIN SPACER, SMALL 1 × $378.00
  • × STOP, ACME NUT DXZ STOP, ACME NUT DXZ 1 × $78.00
  • × MDX 10KW MSTR 10K STAND ALONE MAGNETRON MDX 10KW MSTR 10K STAND ALONE MAGNETRON 1 × $1,000.00
  • × BLADE 6" A101 SHUTTER BLADE 6" A101 SHUTTER 1 × $1,395.00
  • × POWER SUPPLY, 400KHZ RF GEN 1-PHASE POWER SUPPLY, 400KHZ RF GEN 1-PHASE 1 × $1,200.00
  • × BLOCK, MOUNTING, TOP SENSOR LLKA, WBLL BLOCK, MOUNTING, TOP SENSOR LLKA, WBLL 1 × $298.00
  • × CAJON GL PRCS CARRIER AMPULE SCBG CAJON GL PRCS CARRIER AMPULE SCBG 2 × $550.00
  • × SCREW, LID LINER TXZ SCREW, LID LINER TXZ 1 × $25.00
  • × DC PWR SUPPLY, 20KW, 480VAC, NO-HUMP DC PWR SUPPLY, 20KW, 480VAC, NO-HUMP 1 × $18,000.00
  • × RLY ASSY SPST NC COAX MALE CONN W/ BRACKET RLY ASSY SPST NC COAX MALE CONN W/ BRACKET 1 × $850.00
  • × CHUCK ORIENTER 8" CHUCK ORIENTER 8" 1 × $890.00
  • × CARRIER BARATRON CVD TIN GAS BOX CARRIER BARATRON CVD TIN GAS BOX 1 × $750.00
  • × ASSY, DRIVE SCREW, MOTO LIFT ASSY, DRIVE SCREW, MOTO LIFT 1 × $2,101.00
  • × SOURCE ALIGNMENT BRACKET, LONG SOURCE ALIGNMENT BRACKET, LONG 1 × $345.00
  • × ADAPTER, BARATRON WB SHUTTER @ 2 & 4 MIXED ADAPTER, BARATRON WB SHUTTER @ 2 & 4 MIXED 1 × $632.00
  • × PHASETRONICS SINGLE PHASE DRIVE, DXZ PHASETRONICS SINGLE PHASE DRIVE, DXZ 1 × $2,123.00
  • × HARNESS ASSY, TC INTERFACE HARNESS ASSY, TC INTERFACE 1 × $110.00
  • × COVER CHAMBER TOP COVER CHAMBER TOP 1 × $325.00
  • × COLLAR 1.18 DIA SFT COLLAR 1.18 DIA SFT 2 × $190.00
  • × NUT, FEED THRU NUT, FEED THRU 2 × $55.00
  • × PLATE, MODIFIED 5 PHASE MOTOR PLATE, TXZ LIFT PLATE, MODIFIED 5 PHASE MOTOR PLATE, TXZ LIFT 1 × $724.00
  • × CENTERING SCREW CENTERING SCREW 1 × $65.00
  • × STD BODY, LIFT FINGER STD BODY, LIFT FINGER 1 × $105.00
  • × CARRIER, UPPER, HEATER LIFT DXZ CARRIER, UPPER, HEATER LIFT DXZ 1 × $340.00
  • × PVD 6" 4F LIFT HOOP PVD 6" 4F LIFT HOOP 2 × $3,600.00
  • × MOUNTING PLATE PC 2 RF MATCH MOUNTING PLATE PC 2 RF MATCH 1 × $562.00
  • × ASSY, BWCVD THROTTLE VALVE 100, 125, 150MM W/VITON ASSY, BWCVD THROTTLE VALVE 100, 125, 150MM W/VITON 1 × $5,512.00
  • × BLADE SHUTTER, 8" BESC ICE W/ PIN BLADE SHUTTER, 8" BESC ICE W/ PIN 1 × $1,899.00
  • × BELT TMG 3MMP 6MMW 96T HTD NEOPRENE BELT TMG 3MMP 6MMW 96T HTD NEOPRENE 1 × $16.00
  • × XDCR PRESS 100 TORR 1/2FVCR .12%ACC TYPE 624 XDCR PRESS 100 TORR 1/2FVCR .12%ACC TYPE 624 1 × $2,988.00
  • × INPUT MANIFOLD TXZ 200MM CIP INPUT MANIFOLD TXZ 200MM CIP 1 × $3,122.00
  • × PLUG CONNECTOR, RF PLUG CONNECTOR, RF 1 × $40.00
  • × PCB, V452 SYNERGY SBC, 16MB RAM.  Also, PN: 0090-03467 (USED) PCB, V452 SYNERGY SBC, 16MB RAM. Also, PN: 0090-03467 (USED) 1 × $9,500.00
  • × PLATE, SPRING PLATE, SPRING 1 × $79.00
  • × O/D BLANK OFF CCD O/D BLANK OFF CCD 1 × $350.00
  • × GAS FEED THRU TUBE GAS FEED THRU TUBE 1 × $718.00
  • × BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBLL BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBLL 1 × $289.00
  • × CAP, RF, DXZ UNIVERSAL CAP, RF, DXZ UNIVERSAL 2 × $115.00
  • × WINDOW, SLIT AL203 WINDOW, SLIT AL203 1 × $354.00
  • × Conncoax ADPTR Type N Male to Type C Female Conncoax ADPTR Type N Male to Type C Female 1 × $125.00
  • × BLADE 6" SHUTTER BLADE 6" SHUTTER 1 × $1,395.00
  • × PEDESTAL CD/PT WAFER 200 MM PEDESTAL CD/PT WAFER 200 MM 1 × $2,500.00
  • × GAS LINE, REDUCED FTG AMPULE IN CVD RGB GAS LINE, REDUCED FTG AMPULE IN CVD RGB 1 × $950.00
  • × GASLINE AMPULE MANIFOLD VERIFLO GASLINE AMPULE MANIFOLD VERIFLO 1 × $1,500.00
Cart Total:$105,561.00
  • About us

    • overview
    • Contact Us
    • Careers
  • products

    • Refurbished Endura®
    • New SURPASS PVD System
    • AlignKAT™
    • ViewKAT™
    • WaveKAT™
    • MemKAT™
    • More Products
  • Services

    • Engineering Services
    • Demo/Development
    • Foundry Service
    • Customer Traning
  • Part Sales

    • PART STORE
    • EBAY STORE
 

Part Store

Home > Part Store (Page 5)

Showing 49–60 of 295 results

  • BRACKET COMMON CONNECTOR Add to cart
    BRACKET COMMON CONNECTOR
    $243.00
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  • BRACKET, GUIDE SOURCE, SIMP 200MM Add to cart
    BRACKET, GUIDE SOURCE, SIMP 200MM
    $360.00
    Quick View
  • BRACKET, RF MATCH MOUNT Add to cart
    BRACKET, RF MATCH MOUNT
    $517.00
    Quick View
  • BRACKET, SPRING, HEATER LIFT DXZ Add to cart
    BRACKET, SPRING, HEATER LIFT DXZ
    $354.00
    Quick View
  • BRACKET, TXZ SLIT WINDOW Add to cart
    BRACKET, TXZ SLIT WINDOW
    $425.00
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  • BRG LEADSCR & NUT ASSY .5DX.1LEADX4TRVLX8.15L 50U" Add to cart
    BRG LEADSCR & NUT ASSY .5DX.1LEADX4TRVLX8.15L 50U”
    $1,650.00
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  • BRKT, SW MAG/H-SENSOR Add to cart
    BRKT, SW MAG/H-SENSOR
    $147.00
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  • BUSHING TERMINAL BWCVD Add to cart
    BUSHING TERMINAL BWCVD
    $25.00
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  • CABLE ASSY, HEATER 200MM HP TXZ Add to cart
    CABLE ASSY, HEATER 200MM HP TXZ
    $1,850.00
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  • CABLE ASSY, IGNITION NETWORK Add to cart
    CABLE ASSY, IGNITION NETWORK
    $850.00
    Quick View
  • CABLE LID, COVER INTERLOCK SW, DXZ Add to cart
    CABLE LID, COVER INTERLOCK SW, DXZ
    $175.00
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  • CAJON GL PRCS CARRIER AMPULE SCBG Add to cart
    CAJON GL PRCS CARRIER AMPULE SCBG
    $550.00
    Quick View
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