WaveKAT™ ESC Power Supply is a solution for wafer chucking & dechucking issues which cause costly downtime and mishandling/breakage of wafers. WaveKAT™ is a proven, technological upgrade for ESC applications with the capability of waveform customization & improved chucking/dechucking performance.
Programmable dechucking capability without altering process recipe
Wide temperature range capability (-40°C ~ 500°C)
Reduction in dechucking issues especially at temperatures below 200°C
Easy replacement for OEM ESC P/S setup
Minimal footprint on generator rack and can fit in 1U slot space between existing power supplies
Installed and qualified at multiple customer sites with various ESC types (e.g., MCA, MCA+, HT, SLT, SZ, etc.)